Vacuum pump

A vacuum pump is a pump that generates vacuum or further reduces the pressure of an existing vacuum. A vacuum pump can be a positive displacement pump that transports a gas load from an inlet port to an outlet, or exhaust, port. Vacuum pumps can also work on a momentum transfer principle, cryogenic entrapment principles as well as the positive displacement principle.

The vacuum pump was invented by Otto von Guericke.

Types of Vacuum Pumps

• Transfer
  • roots blower
  • rotary compression
  • Diffusion pump
  • turbomolecular pump

• entrapment pump
  • ion pump
  • cryopump